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High Angular Resolution Microbeam Diffraction Analysis of Optoelectronic SAG Structures
PIs: Andrei Sirenko (NJIT)


A2 microbeam high angular resolution setup.  Microbeam of typically 10 is produced by focusing CHESS capillary; high angular resolution is provided by the minature Si or Ge channel-cit crystals (inset) and/or analyzer crystals.


 
Sample: multiple quantum well (MQW) waveguide grown in narrow regions between oxide masks.

High resolution reciprocal space map


Evolution of diffraction pattern from MQW grown in the gap of 20 depending on the width of the oxide mask.

Goal: high angular resolution analysis of strain (composition) and thickness of active layers of optoelectronic structures grown by MOCVD in the regime of selective area growth (SAG);

Optics: one-bounce capillary producing round beam of 10m, miniature Si and Ge channel-cut crystals; Si(111) and multilayer upstream monochromator.

Publications:
 A. A. Sirenko, C. L. Reynolds, L. J. Peticolas, A. Ougazzaden, A. Kazimirov, R. Huang, E. Fontes, and D. Bilderback, “Micro-X-ray Fluorescence and Micro-photoluminescence in InGaAsP and InGaAs Layers Obtained by Selective Area Growth”, Journal of Crystal Growth, 253; 38-45 (2003)

A. Kazimirov, D. H. Bilderback, R. Huang, and A. Sirenko, “Microbeam X-Ray Standing Wave and High Resolution Diffraction”, Synchrotron Radiation Instrumentation: Eighth International Conference on Synchrotron Radiation Instrumentation, AIP Proceedings 705, Eds. Stohr, Padmore, Warwick, Arthur 1027 (2004)

A. Kazimirov, D. H. Bilderback, R. Huang, A. Sirenko, and A. Ougazzaden, “Microbeam High-resolution Diffraction and X-ray Standing Wave Methods Applied to Semiconductor Structures”, Journal of Physics D: Applied Physics, Rapid Communications, 37; L9-L12 (2004)

A. A. Sirenko, A. Kazimirov, R. Huang, D. H. Bilderback, S. O’Malley, V. Gupta, K. Bacher, L. J. P. Ketelsen, and A. Ougazzaden, “Micro-beam High-resolution X-ray Diffraction in Strained InGaAlAs-based Multiple Quantum Well Laser Structures Grown Selectively on Masked InP Substrates”, Journal of Applied Physics, 97; 063512(1-7) (2005)

A. A. Sirenko, A. Kazimirov, A. Ougazzaden, S. O’Malley, D. H. Bilderback, Z.-H. Cai, B. Lai, R. Huang, V. Gupta, M. Chien, and S. N. G. Chu, “Strain Relaxation and Surface Migration Effects in InGaAlAs and InGaAsP Selective Area Grown Ridge Waveguides”, Applied Phys. Letters, 88; 081111 (2006)

A Kazimirov, A A Sirenko, DH Bilderback, Z-H Cai, B Lai, R Huang, A Ougazzaden, “Synchrotron High Angular Resolution Microdiffraction Analysis of Selective Area Grown Optoelectronic Waveguide Arrays”, Journal of Physics D: Applied Physics, 39; 1422-1426 (2006)

2008 Run

Nov 19th - Dec 22nd

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