New tricks for an old dog: A comparison of the etch mechanisms of germanium and silicon
At CHESS, we have adopted this microfabrication technique to develop novel x-ray optics called,Collimating Channel Arrays (CCAs) [1], for confocal x-ray fluorescence microscopy (CXRF). Because the first CCA optics were fabricated from silicon substrates, the range of x-ray fluorescence energies for which they could be used, and hence the elements they could be used to study, was limited. Unwanted x-rays above about 11 keV could penetrate through the silicon, showing up as background and interfering with the measurement.