Upgrade of VBPMs at C-, F- and G-line
Throughout the years, we have developed five different types of VBPMs. These VBPMs are schematically shown in Figure 1 with images created by these devices. All VBPMs provide position information with submicron precision, in addition to visual information about the X-ray cross-sectional shape. The data delivered from the VBPMs are normally updated in each second. This frequency of data delivery is appropriate for the position feedback system and our signal-archiving timing intervals.